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Sizes and distances of metal clusters in Au-, Pt-, W- and Fe-containing diamond-like carbon hard coatings

A comparative study by small angle X-ray scattering, wide angle X-ray diffraction, transmission electron microscopy and scanning tunnelling microscopy
 
: Schiffmann, K.; Fryda, M.; Goerigk, G.; Lauer, R.; Hinze, P.; Bulack, A.

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Thin solid films 347 (1999), No.1/2, pp.60 -71
ISSN: 0040-6090
English
Journal Article
Fraunhofer IST ()
diamond-like carbon; metal cluster

Abstract
Metal-containing diamond-like carbon hard coatings (Me-DLC) consist of nanometer sized metallic particles, embedded into a highly cross-linked amorphous hydrocarbon matrix. Their mechanical, tribological and electrical properties are strongly influenced by the size and density of metallic inclusions within the film. In this paper a systematic investigation of mean sizes and mean centre-of-mass distances of metal clusters in Me-DLC films will be presented. Sizes and distances have been determined as a function of metal content of the films between 0 and 50 at%. Me-DLC films with four different kinds of metals: gold, platinum, tungsten and iron have been analysed, each by four complementary analytical techniques: small angle X-ray scattering, wide angle X-ray diffraction, transmission electron microscopy and scanning tunnelling microscopy. A comparision of results of the different materials will be given as well as a comparison of the suitability of analytical techniques for this special application.

: http://publica.fraunhofer.de/documents/PX-33949.html