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Advances in pulsed magnetron sputtering (PMS-process)
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1994
Conference Paper
Title
Advances in pulsed magnetron sputtering (PMS-process)
Author(s)
Schiller, S.
Goedicke, K.
Metzner, C.
Mainwork
ICMCTF '94. International Conference on Metallurgical Coatings and Thin Films. Proceedings. Vol.1
Conference
International Conference on Metallurgical Coatings and Thin Films 1994
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
