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Advances in plasma emission monitoring for reactive DC magnetron sputtering

 
: Kirchhoff, V.

Society of Vacuum Coaters. 38th Annual Technical Conference 1995. Proceedings
1995
pp.303-308
Society of Vacuum Coaters (Annual Technical Conference) <38, 1995, Chicago>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/PX-3369.html