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Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfaces

 

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IEEE Industrial Electronics Society:
MEMS '94. IEEE Workshop on Micro Electro Mechanical Systems
Piscataway, NJ., 1994
ISBN: 0-7803-1833-1
pp.205-210
Workshop on Micro Electro Mechanical Systems (MEMS) <1994, Oiso>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-33594.html