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Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfaces
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1994
Conference Paper
Title
Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfaces
Author(s)
Henke, W.
Hoppe, W.
Quenzer, H.J.
Staudt-Fischbach, P.
Wagner, B.
Mainwork
MEMS '94. IEEE Workshop on Micro Electro Mechanical Systems
Conference
Workshop on Micro Electro Mechanical Systems (MEMS) 1994
DOI
10.1109/MEMSYS.1994.555624
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
