Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfaces
| IEEE Industrial Electronics Society:
MEMS '94. IEEE Workshop on Micro Electro Mechanical Systems
Piscataway, NJ., 1994
ISBN: 0-7803-1833-1
pp.205-210 |
| Workshop on Micro Electro Mechanical Systems (MEMS) <1994, Oiso> |
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| English |
| Conference Paper |
| Fraunhofer ISIT () |