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SIMOX and wafer bonding, combination of competitors complements one another
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1993
Conference Paper
Titel
SIMOX and wafer bonding, combination of competitors complements one another
Author(s)
Gassel, H.
Vogt, H.
Hauptwerk
Electrochemical Society Meeting '93. Extended Abstracts
Konferenz
Electrochemical Society (Meeting) 1993
Language
English
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Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Tags
Ätzen
Ätzgeschwindigkeit
buried etch stop
etch rate
etching
silicon-on-insulator
SIMOX
wafer bonding