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SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness. Part 1
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1992
Conference Paper
Title
SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness. Part 1
Author(s)
Dura, H.-G.
Gassel, H.
Mokwa, W.
Vogt, H.
Mainwork
Electrochemical Society Meeting '92. Extended Abstracts
Conference
Electrochemical Society (Meeting) 1992
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Keyword(s)
Ätzen
buried oxide
epitaxial layer
Epitaxialschicht
etch stop
etching
Membran
Membranes
SIMOX