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SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness. Part 1
:
Dura, H.-G.
;
Gassel, H.
;
Mokwa, W.
;
Vogt, H.
Electrochemical Society -ECS-:
Electrochemical Society Meeting '92. Extended Abstracts
Pennington/N.J., 1992 (Electrochemical Society - Extended Abstracts 1/92)
ISBN: 1-56677-031-9
pp.321-322
Electrochemical Society (Meeting) <181, 1992, St. Louis/Mo.>
English
Conference Paper
Fraunhofer IMS
(
)
Ätzen
;
buried oxide
;
epitaxial layer
;
Epitaxialschicht
;
etch stop
;
etching
;
Membran
;
Membranes
;
SIMOX
:
http://publica.fraunhofer.de/documents/PX-33545.html
