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SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness. Part 1

 
: Dura, H.-G.; Gassel, H.; Mokwa, W.; Vogt, H.

Electrochemical Society -ECS-:
Electrochemical Society Meeting '92. Extended Abstracts
Pennington/N.J., 1992 (Electrochemical Society - Extended Abstracts 1/92)
ISBN: 1-56677-031-9
pp.321-322
Electrochemical Society (Meeting) <181, 1992, St. Louis/Mo.>
English
Conference Paper
Fraunhofer IMS ()
Ätzen; buried oxide; epitaxial layer; Epitaxialschicht; etch stop; etching; Membran; Membranes; SIMOX

: http://publica.fraunhofer.de/documents/PX-33545.html