Silicon thin film sensor for measurement of dissolved oxygen

A Clark-type oxygen sensor based on a silicon thin film transducer is constructed. Onto the chip a micromachined wafer is atached to form a compartment for the internal electrolyte, which is covered by a gas permeable mebrane. In contrast to other miniaturized sensors a microelectrode array is used as cathode showing the typical adventageous microelectrode properties and allowing to measure in both stirred and unstirred solutions. The sensor is characterized regarding the calibration, long term stability and response time.