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Silicon sensor systems

: Hosticka, B.J.; Brockherde, W.; Hammerschmidt, D.


Analog Integrated Circuits and Signal Processing 14 (1997), No.3, pp.261-273
ISSN: 0925-1030
ISSN: 1573-1979
Journal Article
Fraunhofer IMS ()
integrierte Halbleiterschaltung; Meßaufnehmer; microsystems; Mikrosystemtechnik; silicium; silicon sensors; smart sensors

Silicon sensor systems are based on capability of silicon to serve as a basic material for monolithic cointegration of sensors and electronics. Implementation of this cointegration, its advantages and benefits, and examples of silicon sensor systems form the cental part of this contribution.