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Advanced process control system for vertical furnaces

 

Iturralde, A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Process, equipment, and materials control in integrated circuit manufacturing II
Bellingham, Wash.: SPIE, 1996 (SPIE Proceedings Series 2876)
ISBN: 0-8194-2274-6
pp.16
English
Book Article
Fraunhofer IIS B ( IISB) ()

: http://publica.fraunhofer.de/documents/PX-3344.html