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Shallow, titanium-silicided p and n junction formation by triple germanium amorphization
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1992
Journal Article
Title
Shallow, titanium-silicided p and n junction formation by triple germanium amorphization
Author(s)
Dehm, C.
Gyulai, J.
Ryssel, H.
Journal
Applied Physics Letters
DOI
10.1063/1.107409
Language
English
IIS-B
