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Advanced concepts for UV laser beam shaping with non-rotationally symmetric optical elements

: Unnebrink, L.; Henning, T.; Scholl, M.; Kreutz, E.W.

Beckmann, L.H.J.F. ; European Optical Society -EOS-:
Lasers in material processing
Bellingham, Wash.: SPIE, 1997 (Europto series)
ISBN: 0-8194-2517-6
pp.328-334 : Ill., Lit.
Conference on Lasers in Material Processing <1997, München>
Conference Paper
Fraunhofer ILT ()
beam shaping; excimer laser; multifaceted beam integrator; non-rotationally symmetric optical element

The potential of non-rotationally symmetric optical elements (NOEs) is demonstrated with respect to mask projection techniques with UV excimer laser radiation. NOEs are diamond turned mirrors with an almost arbitrary surface shape. The operation principle of the NOEs presented here is the concept of beam integration including beamlet shaping. Efficient and innovative processing is enabled by generating complex beam profiles adapted to the mask apertures demonstrated for the generation an annular shaped beam profile.