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Sensorarray

Sensor array
 
: Steiner, K.; Hoefer, U.

:
Frontpage ()

DE 1994-4424342 A: 19940711
DE 1994-4424342 A: 19940711
DE 4424342 C1: 19951102
G01N0027
German
Patent, Electronic Publication
Fraunhofer IPM ()

Abstract
Sensor array comprising metal oxide semiconductor gas sensors which are operated as resistors, whereby each sensor consists of a contact electrode (contact pad) applied to a substrate and of a sensor-active layer deposited on said substrate, whereby at least some of the sensors have a different contact spacing L with the contact pads of other sensors and/or a different dimensioning of the surface of the sensor-active layer and/or a different contact boundary surface A between the contact and the sensor-active layer.

: http://publica.fraunhofer.de/documents/PX-33181.html