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1996
Journal Article
Title

Adhesion-inhibited surfaces

Title Supplement
Coated and uncoated interdigitated electrode arrays in the micrometer and submicrometer range
Author(s)
Schnelle, T.
Müller, T.
Voigt, A.
Reimer, K.
Wagner, B.
Fuhr, G.
Journal
Langmuir. The ACS journal of surfaces and colloids  
DOI
10.1021/la950065t
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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