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Adhesion-inhibited surfaces
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1996
Journal Article
Title
Adhesion-inhibited surfaces
Title Supplement
Coated and uncoated interdigitated electrode arrays in the micrometer and submicrometer range
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Author(s)
Schnelle, T.
Müller, T.
Voigt, A.
Reimer, K.
Wagner, B.
Fuhr, G.
Journal
Langmuir. The ACS journal of surfaces and colloids
DOI
10.1021/la950065t
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT