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Schaltungsanordnung zur Stromversorgung fuer gepulst betriebene Vakuumboegen

Circuit arrangement for the power supply of vacuum arcs operated in pulsed mode
 
: Scheibe, H.J.; Uhlemann, H.J.; Siemroth, P.

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Frontpage ()

DE 1990-4037388 A: 19901122
DE 1990-4037388 A: 19901122
EP 1991-918974 AW: 19911111
WO 1991-DE870 A: 19911111
DE 4037388 A1: 19920527
EP 512082 A: 19911111
H05H0001
H01J0037
German
Patent, Electronic Publication
Fraunhofer IWS ()

Abstract
The invention relates to a circuit arrangement for the power supply for vacuum arcs operated in pulsed mode. Objects to which the invention refers are vacuum arcs operated in pulsed mode which are used, for example, as the plasma source in coating technology and for the mass-spectroscopic analysis of conductive samples. In the circuit arrangement for the power supply for vacuum arcs operated in pulsed mode according to the invention, a diode is arranged in parallel to the discharge gap in such a way that the cathode of the diode is connected to the arc anode and the anode of the diode is connected to the arc cathode.

: http://publica.fraunhofer.de/documents/PX-32603.html