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Additional ion bombardment in PVD processes generated by a superimposed pulse bias voltage

 
: Olbrich, W.; Kampschulte, G.

:

Surface and coatings technology 61 (1993), pp.262-267
ISSN: 0257-8972
International Conference on Metallurgical Coatings and Thin Films <20, 1993, San Diego/Calif.>
English
Conference Paper
Fraunhofer IPA ()
Beschichtung; Bias Voltage; Chemie; Elektrochemie; elektrochemische Beschichtung; elektrochemischer Prozeß; physical vapour deposition; PVD

Abstract
The superimposed pulse bias voltage is a tool to apply an additional ion bombardment during deposition in physical vapour deposition (PVD) processes. It is generated by the combination of a d.c. ground voltage and a higher d.c. pulse voltage. Using a superimposed pulse bias voltage in ion-assisted PVD processes effects an additional all-around ion bombardment on the surface with ions of higher energy. Both metal and reactive or inert-gas ions are accelerated to the surface. The basic principles and important characteristics of this newly developed process such as ion fluxes or deposition rates are shown. Because of pulsing the high voltage, the deposition temperature does not increase much. The adhesion, structure, morphology and internal stresses are influenced by these additional ion compacts. The columnar growth of the deposited films could be suppressed by using the superimposed pulse bias voltage without increasing the deposition temperature. Different metallizations (Cr and Cu) p roduced by arc and sputter ion plating are investigated. Carbon-fibre-reinforced epoxy are coated with PVD copper films for further treatment in electrochemical processes.

: http://publica.fraunhofer.de/documents/PX-3247.html