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SAW transducers for gas detection with an integrated heating element

SAW Transducer mit integriertem Heizelement
: Leidl, A.; Zweimüller, T.; Hartinger, R.; Roth, M.; Endres, H.-E.; Hillerich, B.

White, N.M. ; Univ. of Southampton:
Eurosensors XII. Proceedings of the 12th European Conference
Bristol: IOP Publishing, 1998
ISBN: 0-7503-0536-3
ISBN: 0-7503-0536-3
Eurosensors <12, 1998, Southampton>
Conference Paper
Fraunhofer IFF ()
Fraunhofer IFT; 2000 dem IZM eingegliedert
CO2 sensor; heatable transducer; SAW transducer

This paper presents a heatable SAW element for gas detection. It is realised on a quartz substrate (cut for the planned temperature range), has a moderate frequency of 120 MHz, which is reasonable for most sensitive coatings. The heating power is about 460 mW (600C). The maximum operating temperature is limited to 120 0C. The geometry of the heater element is optimised for a flat temperature distribution over the sensor surface (DT < 10C). The paper presents the SAW sensor and his characteristics. Measurements with a CO2 sensitive indicator are described as an application of this transducer.