SAW transducers for gas detection with an integrated heating element

This paper presents a heatable SAW element for gas detection. It is realised on a quartz substrate (cut for the planned temperature range), has a moderate frequency of 120 MHz, which is reasonable for most sensitive coatings. The heating power is about 460 mW (600C). The maximum operating temperature is limited to 120 0C. The geometry of the heater element is optimised for a flat temperature distribution over the sensor surface (DT < 10C). The paper presents the SAW sensor and his characteristics. Measurements with a CO2 sensitive indicator are described as an application of this transducer.