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Roughness and defect characterization of optical surfaces by light scattering measurements

: Truckenbrodt, H.; Duparre, A.; Schuhmann, U.

	Guenther, K.H.: Thin films for optical systems : Tagung 14-18 September 1992, Berlin Bellingham, Wash.: SPIE, 1993 (Europto series) ISBN: 0-8194-0961-8 pp.139-151
	Conference Thin Films for Optical Systems <1992, Berlin>

	English
	Conference Paper
	Fraunhofer IOF ()
	Lichtstreuung; light scattering; Oberflächenrauheit; surface roughness

Abstract
The microtopography of a certain surface is a complicated structure varying across the complete surface. Every surface has different elements of microstructure. In this paper, we consider roughness as a dine structure and defects as large structure elements. Roughnessmeasurement on BK7-glass and CaF2 samples is considered using different techniques. The comparsion includes the automatic scatterometer STREUIX2 and a TIS-measurement system, the ZYGO microprofilometer MAXIM 3D, and the NANO SCOPE III of Digital Instruments. For the investigation of scattering characteristics of different surface defects, a special measuring device was developed. The scattered light distribution of different defects and contaminations measured with this set-up is discussed.

: http://publica.fraunhofer.de/documents/PX-32276.html