Active probes for 2-port network analysis within 70-230 GHZ

Active probes for 2-port on-wafer network analysis within 70-230 GHz are presented. The probe contains an integrated circuit based on nonlinear transmission lines (NLTL) which has all elements of an S-parameter test set. 2-port measurements with these active probes were carried out. Compared to earlier act probe systems, measurement accuracy is greatly improved.