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Removal and transfer of material in laser-assisted physical vapour deposition of ceramics

: Voss, A.; Funken, J.; Alunovic, M.; Sung, H.; Kreutz, E.W.


Thin solid films 220 (1992), pp.116-121 : Abb.,Tab.,Lit.
ISSN: 0040-6090
Journal Article
Fraunhofer ILT ()
emission; formation; mobility; photography; removal; transfer

The removal and transfer of ceramic target materials in laserassisted physical vapour deposition are investigated as a function of laser parameters and processing variables. Removal was measured by a microbalance and characteristics of distribution, transfer by emission spectroscopy and high-speed photography. The composition, the ionization state of the particles and the electron temperature of the vapour/plasma govern the structures of the thin filsm deposited, which are discussed in view of applications.