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Removal and drilling of metals by eximer laser radiation.

Entfernen und Bohren von Metallen mit Excimer-Laserstrahlung
 
: Schulze, W.; Kreutz, E.W.; Poprawe, R.

Waidelich, W.:
Laser/Optoelektronik in der Technik. Vorträge
Berlin: Springer, 1990
ISBN: 3-540-51433-3
pp.679
Laser/Optoelektronik <9, 1989>
English
Conference Paper
Fraunhofer ILT ()
aluminium; Bohrung; bore; copper; drilling; excimer laser; Kupfer; melting temperatur; micromachining; mikromaschinelle Bearbeitung; recoil; recondensation; Rekondensation; Rückstoß; Schmelztemperatur

Abstract
Drilling of metals by excimer laser radiation is influenced mainly by the generated surface plasma, which absorbs a reasonable part of the incident laser radiation. The recoil of the expanding plasma originates in expulsing of the melt out of the processing area.

: http://publica.fraunhofer.de/documents/PX-31719.html