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Acoustic microscopy by atomic force microscopy.

Akustische Mikroskopie mittels Rasterkraftmikroskopie
: Rabe, U.; Arnold, W.


Applied Physics Letters 64 (1994), No.12, pp.1493-1495
ISSN: 0003-6951
ISSN: 1077-3118
Journal Article
Fraunhofer IZFP ()
akustische Mikroskopie; Kraftmikroskopie; Nahfeldmikroskopie; near field microscopy; Rasterkraftmikroskopie; Rastersondenmikroskopie; scanning force microscopy

We have constructed an atomic force microscope enabling one to image the topography of a sample, and to monitor simultaneously ultrasonic surface vibrations in the MHz range. For detection of the distribution of the ultraonic vibration amplitude, a part of the position-sensing light beam reflected from the cantilever is directed to an external knife-edge detector. Acoustic images taken on the surface of a wafer show a lateral resolution of about 100 mm at an ultrasonic frequency of 20 MHz.