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  4. Acoustic microscopy by atomic force microscopy.
 
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1994
Journal Article
Title

Acoustic microscopy by atomic force microscopy.

Other Title
Akustische Mikroskopie mittels Rasterkraftmikroskopie
Abstract
We have constructed an atomic force microscope enabling one to image the topography of a sample, and to monitor simultaneously ultrasonic surface vibrations in the MHz range. For detection of the distribution of the ultraonic vibration amplitude, a part of the position-sensing light beam reflected from the cantilever is directed to an external knife-edge detector. Acoustic images taken on the surface of a wafer show a lateral resolution of about 100 mm at an ultrasonic frequency of 20 MHz.
Author(s)
Rabe, U.
Arnold, W.
Journal
Applied Physics Letters  
DOI
10.1063/1.111869
Language
English
Fraunhofer-Institut für Zerstörungsfreie Prüfverfahren IZFP  
Keyword(s)
  • akustische Mikroskopie

  • Kraftmikroskopie

  • Nahfeldmikroskopie

  • near field microscopy

  • Rasterkraftmikroskopie

  • Rastersondenmikroskopie

  • scanning force microscopy

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