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Readout electronics for wide temperature range with integrated surface micromachined capacitive pressure sensor


Garda, P.:
ESSCIRC '95. 21th European Solid State Circuits Conference. Proceedings
Gif-sur-Yvette: Editions Frontieres, 1995
ISBN: 2-86332-180-3
European Solid State Circuits Conference <21, 1995, Lille>
Conference Paper
Fraunhofer IMS ()
CMOS circuit; CMOS-Schaltung; Drucksensor; kapazitiver Aufnehmer; micromechanics; Mikromechanik; Oberfläche; surface; Temperaturdruck

A monolithically integrated pressure sensor with on-chip readout electronics for a wide range of applications is presented. The cicuit concept is optmized for a large temperature range (-40...+125øC) and a minimum number of connections (three terminal device). The chip is fabricated in a 2 µm CMOS process with additional surface micromachining steps to implement the sensor. Using a pressure independent reference element the maximum overall temperature coefficient can be reduced to 500 ppm without any electronic compensation. the die size is 2.5 x 1.5 mm2.