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The reaction of atomic hydrogen with plasma deposited a-C/H films

Reaktion von atomarem Wasserstoff mit plasmaabgeschiedenen a-C/H Schichten
: Wild, C.; Vietzke, E.; Philipps, V.; Flaskamp, K.

Koidl, P.; Oelhafen, P.:
Amorphous Hydrogenated Carbon Films. Proceedings. Vol.XVII
Paris: Les Editions de Physique, 1987
pp.351-356 : Abb.,Tab.,Lit.
European Materials Research Society (Spring Meeting) <1987, Strasbourg>
Conference Paper
Fraunhofer IAF ()
diamantartiger Kohlenstoff; Korrosion; Oberflächenreaktion; Wasserstoff

In the surface reaction of thermal atomic hydrogen with hard a-C:H films and polymerlike films the main reaction product is CH3 accompanied by a wide spectrum of higher hydrocarbons. The reaction yield has a maximum at around 700 K with a peak value depending on the type of film. When deuterium is used instead of protium atoms the reaction with hard a-C:H films leads to predominantly fully deuterated hydrocarbons and the hydrogen bound in the films is released in form of HD whereas in the reaction with polymerlike films significantly more hydrocarbons of mixed hydrogen isotopes are formed.