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1993
Journal Article
Titel
The reaction between ruthenium dioxide and aluminium nitride in resistor pastes.
Alternative
Die Reaktion zwischen Rutheniumdioxid und Aluminiumnitrid in Widerstandspasten
Abstract
Thermodynamik considerations predict that RuO2 used in resistor pastes for AlN as conductive phase, can be reduced by AlN. In air RuO2 reacts with AlN only to a very small extent. In the presence of a 'non- reducible' glass the reaction between RuO2 and AlN is demonstrated by thermoanalytical, mass spectroscopical and XRD methods. The described reaction could be a reason for bubbles in resistor layers on AlN. A crystallizing glass impedes the complete reaction.