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Absorbing layers for thermal infrared detectors

: Kühl, K.; Lang, W.; Sandmaier, H.

Institute of Electrical and Electronics Engineers -IEEE-:
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
New York/N.Y., 1991
ISBN: 0-87942-585-7
International Conference on Solid-State Sensors and Actuators <6, 1991, San Francisco/Calif.>
Conference Paper
Fraunhofer IFT; 2000 dem IZM eingegliedert
absorber; IR-detector

IR absorbing layers are used to transform radiation into heat. They must combine high absorption with low film thickness. Three methods for their deposition have been investigated: - Thin metallic films. - Platinum black deposited by a galvanic process. - Highly porous metals deposited by evaporation in nitrogen.