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Quantitative depth profiling of Ti-N-C-O coating materials using MCs+-Sims

 
: Willich, P.; Bethke, R.

Gillen, G.; Lareau, R.; Bennett, J.; Stevie, F.:
Secondary ion mass spectrometry. SIMS XI. Proceedings of the Eleventh International Conference on Secondary Ion Mass Spectrometry
Chichester: Wiley, 1998
ISBN: 0-471-97826-4
pp.991
International Conference on Secondary Ion Mass Spectrometry (SIMS) <11, 1997, Orlando/Fla.>
English
Conference Paper
Fraunhofer IST ()

: http://publica.fraunhofer.de/documents/PX-30635.html