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Quantitative depth profiling of Ti-N-C-O coating materials using MCs+-Sims
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1998
Conference Paper
Titel
Quantitative depth profiling of Ti-N-C-O coating materials using MCs+-Sims
Author(s)
Willich, P.
Bethke, R.
Hauptwerk
Secondary ion mass spectrometry. SIMS XI. Proceedings of the Eleventh International Conference on Secondary Ion Mass Spectrometry
Konferenz
International Conference on Secondary Ion Mass Spectrometry (SIMS) 1997
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST