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Quantitative depth profiling of Ti-N-C-O coating materials using MCs+-Sims
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1998
Conference Paper
Title
Quantitative depth profiling of Ti-N-C-O coating materials using MCs+-Sims
Author(s)
Willich, P.
Bethke, R.
Mainwork
Secondary ion mass spectrometry. SIMS XI. Proceedings of the Eleventh International Conference on Secondary Ion Mass Spectrometry
Conference
International Conference on Secondary Ion Mass Spectrometry (SIMS) 1997
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
