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Quantitative Analysis of W-C:H coatings by EPMA, RBS (ERD) and SIMS

: Willich, P.; Wang, M.; Wittmaack, K.


Mikrochimica Acta 114-115 (1994), pp.525-532
ISSN: 0026-3672
Journal Article
Fraunhofer IST ()
EPMA; ERD; hydrogen; Metall-C:H; quantitative analysis of coatings; quantitative Schichtanalyse; RBS; SIMS; Wasserstoff

Several analytical techniques have been used to characterize homogeneous films of tungsten-containing hydrogenated carbon (W-C:H), deposited on Si with a film thickness of 1-1.5 mym. Electron probe micro-analysis (EPMA) enables one to determine the major components W (3-43 at %) and C, impurities (smaller than 2 at %) of Ar and O, and the mass thickness (300-1800 myg/qcm) of the films. The agreement between the results of EPMA and the data (W-content, mass thickness) provided by Rutherford backscattering spectrometry (RBS) is 5-10% relative. Quantitative analysis of hydrogen in W-C:H films (1-16 at %) is carried out by the technique of elastic recoil detection (ERD). A suitable scheme for the determination of H in W-C:H films by SIMS is proposed, based on monitoring the intersity ratio of HCs plus/CCs plus secondary ions.