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Quality assessment from supersmooth to rough surfaces by multiple-wavelength light scattering measurement

: Duparre, A.; Gliech, S.

Gu, Z.-H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Scattering and surface roughness
Bellingham, Wash.: SPIE, 1997 (SPIE Proceedings Series 3141)
ISBN: 0-8194-2563-X
International Symposium on Optical Science, Engineering and Instrumentation <1997, San Diego/Calif.>
Conference Paper
Fraunhofer IOF ()
defect detection; Fehleraufdeckung; light scattering measurement; Normung; Oberflächenrauheit; Qualitätskontrolle; quality control; standartization; Streulichtmessung; surface roughness

An apparatus for total integrated backscattering measurement is described that operates in the UV to IR spectral region. Background levels smaller than 0. 1 ppm at 633 nm have been achieved. During the measurement, the sample surface is scanned automatically, yielding one -or two-dimensional scattering diagrams. From the latter, small defects on supersmooth surfaces can be localized. Results are reported of measurements on samples waith different surface qualities such as spersmooth Si-wafers with sub-Angström roughness, CaF2 substrates, thin film optical coatings and rough engineering surfaces. The equipment is involved in standardization project ISO/CD 13696.