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An absolute air pressure smart sensor family with 2 dimensional calibration


Hosticka, B.J.; Zimmer, G.; Grünbacher, H.:
ESSCIRC '99. Proceedings : Duisburg, Germany, 21-23 September 1999
Neuilly: Ed. Frontieres, 1999
ISBN: 2-86332-246-X
European Solid State Circuits Conference (ESSCIRC) <25, 1999, Duisburg>
Conference Paper
Fraunhofer IMS ()
calibration; Druckaufnehmer; Kalibriereinrichtung; Kondensator; Linearisierung; linearization; oberflächenmontiertes Bauelement; pressure transducer; sl-technique; surface micromachining; temperature compensation; Temperaturkompensation

We present a monolithic pressure transducer family with on-chip pressure sensor, readout, linearization, and temperature compensation, reaching an 1% accuracy after calibration. Temperature compensation and linearization are realized by two dimensional pwl interpolation using sigma--modulators. This accuracy requires only a few calibration points for full pressure and temperature range. A prototype sensor system has been fabricated in an 1.2µm CMOS-process with surface micromachining extension and occupies a chip area of 11.8mm². The power consumption of this sensor system is ca. 6mW.