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1998
Conference Paper
Titel
Qualification of Products for Equipping Cleanrooms
Alternative
Qualifizierung von Reinraumanlagen und -geräten
Abstract
It's described a qualification method for testing cleanroom products like for example Production equipment, cleanroom clothing (overalls, gloves, etc.), interior facilities (tables, chairs, flooring systems, etc.), measurement and testing equipment, transport equipment, storage installations (carrier, boxes, etc.). The goal is to establish a standardized procedure for the qualification of cleanroom products.
Konferenz
Language
English