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  4. Pyroelectric sensors and arrays based on P(VDF/TrFE) copolymer films
 
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1995
Journal Article
Title

Pyroelectric sensors and arrays based on P(VDF/TrFE) copolymer films

Abstract
A central problem of the sensor design is a good thermal insulation of the P(VDF/TrFE) thin film from the read-out circuit. Two variations were examined - thin carrier membranes of SiO2/Si3N4 produced through back etching and thick thermal insulating layers out of spin-coated polymers with via holes. Membrane sensors consisting of 1 mu m P(VDF/TrFE) thin film deposited on a 0.65 mu m thick membrane show within the frequency range of 10 Hz to 1 kHz comparatively higher values for responsivity and specific detectivity than insulating layer sensors. The insulating layer sensors have in the most favourable case a themal cut-off frequency of about 100 Hz. The optimal layer thickness for the compound of BCB and P(VDF/TrFE) for a chopper frequency of about 100 Hz is at approximately 18...25 mu m. The advantages of the design with insulating layer are however, a filling factor of almost 100 per cent independently of the pixel size and very small pixels of about (50x50) mu m2.
Author(s)
Neumann, N.
Köhler, R.
Gottfried Gottfried, R.
Heß, N.
Journal
Integrated ferroelectrics  
DOI
10.1080/10584589508013574
Language
English
IMS2  
Keyword(s)
  • Dünnschichttechnik

  • Infrarotsensor

  • Pyroelektrischer Sensor

  • Wärmeisolation

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