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Pulsed technology - a new era of magnetron sputtering

 
: Schiller, S.; Goedicke, K.; Kirchhoff, V.; Kopte, T.

Society of Vacuum Coaters. 38th Annual Technical Conference 1995. Proceedings
1995
pp.293-297
Society of Vacuum Coaters (Annual Technical Conference) <38, 1995, Chicago>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/PX-30231.html