Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Pulsed technology - a new era of magnetron sputtering
| Society of Vacuum Coaters. 38th Annual Technical Conference 1995. Proceedings
1995
pp.293-297 |
| Society of Vacuum Coaters (Annual Technical Conference) <38, 1995, Chicago> |
|
| English |
| Conference Paper |
| Fraunhofer FEP () |