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Pulsed plasma activated deposition of plastic films
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1997
Conference Paper
Title
Pulsed plasma activated deposition of plastic films
Author(s)
Schiller, S.
Kirchhoff, V.
Kopte, T.
Schulze, M.
Mainwork
Society of Vacuum Coaters. 40th Annual Technical Conference 1997. Proceedings
Conference
Society of Vacuum Coaters (Annual Technical Conference) 1997
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP