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  4. Pulsed plasma activated deposition of plastic films
 
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1997
Conference Paper
Title

Pulsed plasma activated deposition of plastic films

Author(s)
Schiller, S.
Kirchhoff, V.
Kopte, T.
Schulze, M.
Mainwork
Society of Vacuum Coaters. 40th Annual Technical Conference 1997. Proceedings  
Conference
Society of Vacuum Coaters (Annual Technical Conference) 1997  
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP  
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