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Pulsed plasma activated deposition of plastic films
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1997
Conference Paper
Titel
Pulsed plasma activated deposition of plastic films
Author(s)
Schiller, S.
Kirchhoff, V.
Kopte, T.
Schulze, M.
Hauptwerk
Society of Vacuum Coaters. 40th Annual Technical Conference 1997. Proceedings
Konferenz
Society of Vacuum Coaters (Annual Technical Conference) 1997
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP