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Proximity correction for e-beam pattering on X-ray mask blanks
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1989
Conference Paper
Titel
Proximity correction for e-beam pattering on X-ray mask blanks
Author(s)
Reimer, K.
Pongratz, S.
Hauptwerk
33rd International Symposium on Electron, Ion and Photon Beams '89. Proceedings
Konferenz
International Symposium on Electron, Ion and Photon Beams 1989
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT