Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Progress in high rate plasma activated PVD technology
| Third International Symposium on Sputtering and Plasma Processes. ISSP '95. Proceedings
1995
pp.79 |
| International Symposium on Sputtering and Plasma Processes <3, 1995, Tokyo> |
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| English |
| Conference Paper |
| Fraunhofer FEP () |