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Programs for data processing of electron probe microanalysis applied to thin films and multilayers

: Willich, P.; Schiffmann, K.I.

7. CAMUS-Treffen
CAMUS-Treffen <7, 1992, Karlsruhe>
Conference Paper
Fraunhofer IST ()
data reduction; electron probe microanalysis; EMPA; film composition; film thickness; multilayer; PAP-model; software; thin films

Electron probe microanalysis (EPMA) offers the possibility to investigate very thin films having a typical thickness of 10 to 1000 nm. Based on the PAP-model of Pouchou and Pichoir a data reduction procedure is presented which enables very fast determination of composition and film thickness of single films or multilayer systems on a substrate. The results agree within 3-5% with those obtained by reference methods. A software package consisting of three programs is presented which enables preprocessing of experimental data, calculation of composition and film thicknesses and presentation of results. Instructions for installation and the use of the three programs in combination with CAMECA SX50 acqusition software are given.