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248 nm laser interaction studies on LaF3/MgF2 optical coatings by mass spectroscopy and x-ray photoelectron spectroscopy


Bennett, H.E.:
Laser-induced damage in optical materials 1995. Proceedings
Bellingham, Wash.: SPIE, 1996 (SPIE Proceedings Series 2714)
ISBN: 0-8194-2089-1
pp.405 ff
Symposium on Optical Materials for High-Power Lasers <27, 1995, Boulder/Colo.>
Conference Paper
Fraunhofer IOF ()
Dünne optische Schicht; excimer laser optics; Excimer-Laser-Optik; fluoride thin films; Fluoridschicht; laser induced damage threshold; Laserzerstörschwelle; optical coating; optical thin films; oxide thin films; Oxidschicht; ultraviolet spectral region; ultravioletter Spektralbereich; UV

A UHV surface analysis system combined with an optical setup was used in the present work to study the conditioning mechanism on MgF2/LaF3HR coatings at 248 nm excimer laser wavelength. During laser irradiation of the sample the laser-induced emission of contaminants and coating material from the sample surface was recorded by a quadrupole mass spectrometer. To analyze changes in composition and chemical bonds of the coating surface XPS-measurements were performed before, during and after irradiation in dependence on sample design, number of pulses and oxygen atmosphere.