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Present status and problems of X-ray lithography.
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1981
Conference Paper
Title
Present status and problems of X-ray lithography.
Other Title
Derzeitiger Stand und Probleme der Roentgenlithographie
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Author(s)
Betz, H.
Heuberger, A.
Mainwork
SEMICON Europa 1981. Proceedings
Conference
Semicon Europa 1981
Language
English
IFT
Keyword(s)
Lithographie
Röntgenstrahlen
Stand der Technik