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Preparation of soft X-ray monochromators by laser pulse vapour deposition -LPVD-

Herstellung von Monochromatoren für weiche Röntgenstrahlung durch Laserimpuls-Gasphasenabscheidung
 
: Mai, H.; Dietsch, R.; Pompe, W.

Kenway, P.B.; Duke, P.J.; Lorimer, G.W.; Mulvey, T.; Drummond, I.W.; Love, G.; Michette, A.G.; Stedman, M.:
X-ray optics and microanalysis 1992. Proceedings
Bristol: IOP Publishing, 1992 (Institute of Physics - Conference Series 130)
ISBN: 0-7503-0255-0
pp.503-506 : Abb.,Lit.
International Congress on X-Ray Optics and Microanalysis <13, 1992, Manchester>
English
Conference Paper
Fraunhofer IWS ()
dünne Schicht; laser ablation; Ni/C multilayer structure; Ni/C-Multischicht; plasma source; Plasmaquelle; Röntgenbeugung; Röntgenspiegel; TEM-cross-section; thin films; UHV-Abscheideeinrichtung; UHV-deposition equipment; x-ray diffraction; X-ray mirror

Abstract
The paper describes the design of our latest equipment for LPVD of multilayer structures. In detail an UHV-device (base pressure typical 10highminus10 mbar) has been equipped with a new target/substrate manipulator system that allows the deposition of individual layers of good thickness homogeneity. The ablation of the targets is induced by a Nd-YAG-laser (wavelength 1.064 mym, pulse energy 0.9 J, pulse length 7 ns, repetition rate 30 Hz). The deposition process is controlled by an iPC-486 computer i.e. target and substrate are stepper motor driven with reference to quartz oscillator monitoring. Model specimens of Ni/C-layer stacks have been prepared and charaterized by various techniques.

: http://publica.fraunhofer.de/documents/PX-29277.html