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1997
Journal Article
Title

Prägen feinstrukturierter optischer Oberflächen

Other Title
The embossing of fine structurized optical surfaces
Abstract
An important prerequisite for large-scale industrial use of new microsystems with micromechanical, microelectrical and microoptical components is possibility of low-cost production of these systems in large numbers. Replication techniques such an embossing and injection moulding offer this opportunity. In order to assess the prospects and limitation of this technique a device for hot embossing was developed at the Fraunhofer Institution in Jena.
Author(s)
Kießling, H.
Damm, C.
Dannberg, P.
Rudolf, M.
Journal
F und M. Feinwerktechnik, Mikrotechnik, Mikroelektronik  
Language
German
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • diffraktive Optik

  • Heißprägen

  • integrierte Optik

  • Mikrostruktur

  • polymer

  • Replikation

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