The embossing of fine structurized optical surfaces

: Kießling, H.; Damm, C.; Dannberg, P.; Rudolf, M.

Abstract
An important prerequisite for large-scale industrial use of new microsystems with micromechanical, microelectrical and microoptical components is possibility of low-cost production of these systems in large numbers. Replication techniques such an embossing and injection moulding offer this opportunity. In order to assess the prospects and limitation of this technique a device for hot embossing was developed at the Fraunhofer Institution in Jena.