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Prägen feinstrukturierter optischer Oberflächen

The embossing of fine structurized optical surfaces
: Kießling, H.; Damm, C.; Dannberg, P.; Rudolf, M.

F und M. Feinwerktechnik, Mikrotechnik, Mikroelektronik 105 (1997), No.3, pp.174-177
ISSN: 1437-9503
ISSN: 0944-1018
Journal Article
Fraunhofer IOF ()
diffraktive Optik; Heißprägen; integrierte Optik; Mikrostruktur; polymer; Replikation

An important prerequisite for large-scale industrial use of new microsystems with micromechanical, microelectrical and microoptical components is possibility of low-cost production of these systems in large numbers. Replication techniques such an embossing and injection moulding offer this opportunity. In order to assess the prospects and limitation of this technique a device for hot embossing was developed at the Fraunhofer Institution in Jena.