Practical aspects of modern electron probe microanalysis

Electron probe microanalysis (EPMA) is presented as a versatile technique of local quantitative analysis in the near-surface region. Recent developments concern the sensitive detection of the ultra-light elements (B, C, N, 0) including the possibility of accurate quantitative analysis when EPMA is based on wavelength-dispersive X-ray spectrometry (WDS). Modem matrix correction procedures include the possibility of analysis at low electron energies and offer practically useful applications in respect of thin films and layered structures.