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Practical aspects of modern electron probe microanalysis

: Willich, P.

Tammi, R.; Sorvari, R. ; Kuopio University; Scandinavian Society for Electron Microscopy -SCANDEM-:
Scandinavian Society for Electron Microscopy. 46th Annual Meeting 1994. Proceedings
Kuopio, 1994
ISBN: 951-780-647-7
Scandinavian Society for Electron Microscopy (Annual Meeting) <46, 1994, Kuopio>
Conference Paper
Fraunhofer IST ()
coating structure; dünne Schicht; electron probe microanalysis; Elektronenstrahlmikroanalyse; layered structure; Schichtstruktur

Electron probe microanalysis (EPMA) is presented as a versatile technique of local quantitative analysis in the near-surface region. Recent developments concern the sensitive detection of the ultra-light elements (B, C, N, 0) including the possibility of accurate quantitative analysis when EPMA is based on wavelength-dispersive X-ray spectrometry (WDS). Modem matrix correction procedures include the possibility of analysis at low electron energies and offer practically useful applications in respect of thin films and layered structures.