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  4. Practical aspects of modern electron probe microanalysis
 
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1994
Conference Paper
Title

Practical aspects of modern electron probe microanalysis

Abstract
Electron probe microanalysis (EPMA) is presented as a versatile technique of local quantitative analysis in the near-surface region. Recent developments concern the sensitive detection of the ultra-light elements (B, C, N, 0) including the possibility of accurate quantitative analysis when EPMA is based on wavelength-dispersive X-ray spectrometry (WDS). Modem matrix correction procedures include the possibility of analysis at low electron energies and offer practically useful applications in respect of thin films and layered structures.
Author(s)
Willich, P.
Mainwork
Scandinavian Society for Electron Microscopy. 46th Annual Meeting 1994. Proceedings  
Conference
Scandinavian Society for Electron Microscopy (Annual Meeting) 1994  
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST  
Keyword(s)
  • coating structure

  • dünne Schicht

  • electron probe microanalysis

  • Elektronenstrahlmikroanalyse

  • layered structure

  • Schichtstruktur

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