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The potential of transmittive microoptical systems for miniaturized scanners, modulators and switches

: Göring, R.; Glöckner, S.


Motamedi, M.E.; Hornbeck, L.J.; Pister, K.S.J. ; United States, Defense Advanced Research Projects Agency:
Miniaturized systems with micro-optics and micromechanics II
Bellingham, Wash.: SPIE, 1997 (SPIE Proceedings Series 3008)
ISBN: 0-8194-2419-6
Conference on Miniaturized Systems with Micro-Optics and Micromechanics <2, 1997, San Jose/Calif.>
Conference Paper
Fraunhofer IOF ()
microoptical switch; microoptics; optical scanner; piezoelectric actuator

The utilization of microoptical components in systems for optical beam deflection and modulation offers the possibility for realization of miniaturized switches and scanners. As the required displacement of the microoptical components for efficient beam manipulation is quite small, high speed actuators with small electrical power consumption can be used. We presented a variety of microoptical configurations and discuss their potential for the creation of different types of miniaturized scanners and switches. The combination of microoptical components already available and semiclassical piezoelectric actuators leads to new types of switching and modulation systems for a very broad spectrum of applications.