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1994
Conference Paper
Titel
Postprocessing of nm-period multilayer structure
Alternative
Nachbehandlung von nm-Multischichtstrukturen
Abstract
We study effects of macro- and micro-postprocessing of multilayered synthetic Ni/C film structures. The structures have nm-period one-dimensional modulation of concentration of the major components. Initially low surface and interface roughness of such structures makes them advantageous for application as a new type of substrates n nanofabrication technologies and for information storage with nm-resolution. Metastability of microstructure and high residual stresses favour the use of the structures themselves as a media for fine-scale processing.