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  4. Polycrystalline diamond films for optical applications
 
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1991
Conference Paper
Title

Polycrystalline diamond films for optical applications

Other Title
Polykristalline Diamantschichten für optische Anwendungen
Abstract
The applicability of CVD diamond films in optics is investigated. Emphasis is put on the role of the surface roughness as the most critical parameter influencing the optical quality of polycrystalline diamond films. In particular we report on the preparation of optically smooth, thin diamond films, on the in situ analysis of the optical quality, on the coating of large area substrates, and on the growth of thick, free-standing diamond wafers with flat surfaces.
Author(s)
Müller-Sebert, W.
Eckermann, Thomas
Koidl, P.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Wild, C.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Mainwork
ADC '91. Applications of Diamond Films and Related Materials. Proceedings  
Conference
International Conference on the Applications of Diamond Films and Related Materials 1991  
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Keyword(s)
  • in-situ characterization

  • in-situ Charakterisierung

  • optical application

  • optical property

  • optische Anwendung

  • optische Eigenschaft

  • polycrystalline diamond

  • polykristalliner Diamant

  • scattering

  • Streuung

  • Textur

  • texture

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