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Patent
Title

Plasmareaktor

Other Title
Plasma reactor for chemical vapor deposition plasma surface treatment or plasma etching.
Abstract
NOVELTY - The plasma reactor has a reactor housing (2) acting as a microwave resonator coupled to a HF generator (6) via a HF coaxial line (5) and containing a holder (3) for the treated substrate, with entry and exit connections (10,11) for the process gas. The feed end of the coaxial line is divided and passed around the outside of the reactor housing for alignment with an annular microwave window (12). USE - Used for chemical vapor deposition, plasma surface treatment or plasma etching of a substrate. ADVANTAGE - The cooling, positioning and temperature regulation of the treated substrate is facilitated.
Inventor(s)
Wild, C.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Koidl, P.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Link to Espacenet
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=19802971A
Patent Number
1998-19802971
Publication Date
2002
Language
German
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
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