
Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Plasmafeinreinigen. Perspektiven
Plasma fine cleaning. Possibilities and limits
| Metalloberfläche : mo 49 (1995), No.1, pp.22-26 ISSN: 0026-0797 ISSN: 0043-2792 |
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| German |
| Journal Article |
| Fraunhofer IGB () |
| low pressure plasma cleaning; Niederdruck-Plasmabehandlung |
Abstract
The present article provides a survey of the use of low-pressure plasma plants for cleaning and the pretreatment of solvent and aqueous-alkaline processes, where even anorganic pollutions may be partly eliminated as well. Frequently, however, a wet chemical cleaning is still indispensable.