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Plasmafeinreinigen. Perspektiven

Plasma fine cleaning. Possibilities and limits
 
: Oehr, C.; Vohrer, U.

Metalloberfläche : mo 49 (1995), No.1, pp.22-26
ISSN: 0026-0797
ISSN: 0043-2792
German
Journal Article
Fraunhofer IGB ()
low pressure plasma cleaning; Niederdruck-Plasmabehandlung

Abstract
The present article provides a survey of the use of low-pressure plasma plants for cleaning and the pretreatment of solvent and aqueous-alkaline processes, where even anorganic pollutions may be partly eliminated as well. Frequently, however, a wet chemical cleaning is still indispensable.

: http://publica.fraunhofer.de/documents/PX-28796.html