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Plasmaätzen zum Reinigen und Modifizieren von Oberflächen

Plasmaetching for cleaning and modification of surfaces
 
: Fessmann, J.

Deutsche Forschungsgesellschaft für Oberflächenbehandlung e.V. -DFO-:
SURTEC '91. 6. Internationaler Kongreß für Oberflächentechnik
Düsseldorf, 1991
pp.449-456
SURTEC <6, 1991, Berlin>
German
Conference Paper
Fraunhofer IPA ()
Oberflächenbearbeiten; Plasmaätzen; plasmaetching; reinigen

Abstract
Dry plasmaetching is a new approach for an environmentally safe cleaning and drying of metallic and polymer surfaces. Corrosion or temperature sensitive materials can be processed successfully. In case of plastics, plasmaetching is accompanied by a modification of the polymer surface thus creating active organic coatings. In the paper, typical applications of plasmaetching in surface technology for cleaning and drying, vacuum and electrochemical coating, organic coating and ashing will be presented.

: http://publica.fraunhofer.de/documents/PX-28791.html