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Plasmaactivated reactive evaporation of AL203 on plastic films - state of the art and outlook

 
: Schiller, S.

European Vacuum Coaters. Symposium '94. Proceedings
1994
pp.181
European Vacuum Coaters (Symposium) <1,1994, Anzio>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/PX-28787.html