Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Plasma source for ion and electron beam lithography
| Journal of vacuum science and technology B. Microelectronics and nanometer structures 16 (1998), No.6, pp.3367
ISSN: 0734-211X
ISSN: 1071-1023 |
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| English |
| Journal Article |
| Fraunhofer ISIT () |