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Plasma-activated high rate EB deposition of metals and oxides onto strip steel
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1995
Conference Paper
Title
Plasma-activated high rate EB deposition of metals and oxides onto strip steel
Author(s)
Schiller, S.
Goedicke, K.
Zywitzki, O.
Hötzsch, G.
Mainwork
Society of Vacuum Coaters. 38th Annual Technical Conference 1995. Proceedings
Conference
Society of Vacuum Coaters (Annual Technical Conference) 1995
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
